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SPIE Proceedings [SPIE 26th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 25 February 2001)] Advances in Resist Technology and Processing XVIII - Design and performance of photoresist materials for ArF lithography
Kim, Hyun-Woo, Jung, Dong-Won, Lee, Sook, Choi, Sang-Jun, Woo, Sang-Gyun, Kavanagh, Robert J., Barclay, George G., Blacksmith, Robert F., Kang, Doris, Pohlers, Gerd, Cameron, James F., Mattia, Joe, CaVolume:
4345
Année:
2001
Langue:
english
DOI:
10.1117/12.436908
Fichier:
PDF, 330 KB
english, 2001