
SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Tuesday 18 October 1994)] Microelectronics Manufacturability, Yield, and Reliability - Reliability improvement of integrated circuits through alkali contamination reduction in dielectric films
Lundquist, Carrie, Allen, Tara, Delgado, Rafael, Dunnigan, S., Cadenhead, J., Mautz, Karl E., Peterson, Jim, Stevens, H., Vasquez, Barbara, Kawasaki, HisaoVolume:
2334
Année:
1994
Langue:
english
DOI:
10.1117/12.186755
Fichier:
PDF, 273 KB
english, 1994