A study of defects in nanostructured amorphous silicon nitride
Tao Wang, Lide Zhang, Chimei Mo, Jitong Hu, Cunyi XieVolume:
139
Année:
1993
Langue:
english
Pages:
5
DOI:
10.1002/pssa.2211390204
Fichier:
PDF, 302 KB
english, 1993