
Highly ordered hexagonally arranged sub-200 nm diameter vertical cylindrical pores on p-type Si using non-lithographic pre-patterning of the Si substrate
Filimon Zacharatos, Violetta Gianneta, Androula G. NassiopoulouVolume:
206
Année:
2009
Langue:
english
Pages:
4
DOI:
10.1002/pssa.200881111
Fichier:
PDF, 344 KB
english, 2009