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On the Parameters of Inductively Coupled and Microwave BF3 Plasmas Used for Plasma Immersion Ion Implantation
Yakov N. Sukhanov, Alexey P. Ershov, Konstantin V. Rudenko, Alexander A. OrlikovskyVolume:
2
Année:
2005
Langue:
english
Pages:
8
DOI:
10.1002/ppap.200500006
Fichier:
PDF, 156 KB
english, 2005