
Development of a new annealing process to allow new top electrode materials for SrBi 2 Ta 2 O 9 capacitors
Watanabe, Koji, Tanaka, Masahiro, Nagel, Nicolas, Katori, Kenji, Sugiyama, Masataka, Yamoto, Hisayoshi, Yagi, HajimeVolume:
17
Langue:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584589708013019
Date:
September, 1997
Fichier:
PDF, 596 KB
english, 1997