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Molecular beam deposition of high-permittivity polydimethylsiloxane for nanometer-thin elastomer films in dielectric actuators
Weiss, Florian M., Madsen, Frederikke B., Töpper, Tino, Osmani, Bekim, Leung, Vanessa, Müller, BertVolume:
105
Langue:
english
Journal:
Materials & Design
DOI:
10.1016/j.matdes.2016.05.049
Date:
September, 2016
Fichier:
PDF, 1.59 MB
english, 2016