Detection of Voids in Tungsten Interconnect Vias Using Laser-Induced Surface Acoustic Waves
Tower, Joshua, Gostein, Michael, Otsubo, Koichi, Kawasaki, AtsushiVolume:
766
Année:
2003
Langue:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-766-e3.4
Fichier:
PDF, 476 KB
english, 2003