Thin Film Capacitors Cut from Single Crystals Using Focused Ion Beam Milling
Saad, M. M., Donnelly, N. J., Bowman, R. M., Gregg, J. M.Volume:
748
Langue:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-748-u8.4
Date:
January, 2002
Fichier:
PDF, 847 KB
english, 2002