Chemical Vapor Deposition of Titania/Silica and Zirconia Films
Gladfelter, Wayne L., Smith, Ryan C., Burleson, David, Taylor, Charles J., Roberts, Jeffrey T., Campbell, Stephen A., Hoilien, Noel, Tiner, Mike, Hegde, Rama, Hobbs, ChristopherVolume:
670
Langue:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-670-k4.1
Date:
January, 2001
Fichier:
PDF, 4.20 MB
english, 2001