Photo-Assisted Mocvd Growth of High Dielectric (Ba,Sr)TiO3 Thin Films on Ni/TiN/Si Substrate for Dram Application
Chen, Y. M., Wu, N. J., Ignatiew, A.Volume:
596
Langue:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-596-49
Date:
January, 1999
Fichier:
PDF, 972 KB
english, 1999