Direct-write Focused Ion Beam Lithography
Joshi-Imre, A, Ocola, L, Klingfus, JVolume:
16
Langue:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927610062872
Date:
July, 2010
Fichier:
PDF, 2.03 MB
english, 2010