Small d-Spacing and Internal Stress of Co-Cr Films Deposited by Kr Ion Sputtering
Akiyama, S., Nakagawa, S., Naoe, M.Volume:
231
Langue:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-231-335
Date:
January, 1991
Fichier:
PDF, 799 KB
english, 1991