Comparative Study of Cu Films Prepared by DC, High-Power Pulsed and Burst Magnetron Sputtering
Solovyev, A. A., Oskirko, V. O., Semenov, V. A., Oskomov, K. V., Rabotkin, S. V.Volume:
45
Langue:
english
Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-016-4582-6
Date:
August, 2016
Fichier:
PDF, 1.07 MB
english, 2016
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