Residual stress and Young's modulus of pulsed laser deposited PZT thin films: Effect of thin film composition and crystal direction of Si cantilevers
Nazeer, H., Nguyen, M.D., Rijnders, G., Abelmann, L., Sukas, Ö. SardanLangue:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2016.04.004
Date:
April, 2016
Fichier:
PDF, 440 KB
english, 2016