Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
2015 / 11 Vol. 9; Iss. 6
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Atomic and electronic structure of amorphous and nanocrystalline layers of semi-insulating silicon produced by chemical-vapor deposition at low pressures
Domashevskaya, E. P., Terekhov, V. A., Turishchev, S. Yu., Prijimov, A. S., Kharin, A. N., Parinova, E. V., Rumyantseva, N. A., Usoltseva, D. S., Fomenko, Yu. L., Belenko, S. V.Volume:
9
Langue:
english
Journal:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
DOI:
10.1134/S1027451015060257
Date:
November, 2015
Fichier:
PDF, 784 KB
english, 2015