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SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - MEMS pressure sensor fabricated by advanced bulk micromachining techniques
Vanko, Gabriel, Hudek, Peter, Zehetner, Johann, Dzuba, Jaroslav, Choleva, Pavlina, Vallo, Martin, Rýger, Ivan, Lalinský, Tibor, Schmid, Ulrich, Sánchez de Rojas Aldavero, José Luis, Leester-Schaedel,Volume:
8763
Année:
2013
Langue:
english
DOI:
10.1117/12.2017499
Fichier:
PDF, 450 KB
english, 2013