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[IEEE 2013 International Semiconductor Conference (CAS 2013) - Sinaia, Romania (2013.10.14-2013.10.16)] CAS 2013 (International Semiconductor Conference) - Investigations of surface properties of SiO2 and Si3N4 thin layers, used for MEMS vibrating structures applications
Voicu, Rodica, Obreja, Cosmin, Gavrila, Raluca, Muller, Raluca, Rymuza, Zygmund, Michalowski, MarcinAnnée:
2013
Langue:
english
DOI:
10.1109/smicnd.2013.6688104
Fichier:
PDF, 1.05 MB
english, 2013