[IEEE 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 - Alpbach, Austria (17-22 Sept. 2000)] 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) - Intense UV-visible photoluminescence from Si/sup +/ and N/sup +/ co-implanted thermal SiO/sub 2/ films
Yu, Y.H., Li, L., Lei, Y.M., Zhao, J., Mao, D.S., Zou, S.C., Sundaraval, B., Luo, E.Z., Wong, S.P., Xu, J.B., Wilson, I.H.Année:
2000
Langue:
english
DOI:
10.1109/iit.2000.924266
Fichier:
PDF, 270 KB
english, 2000
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