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[IEEE IEEE Sensors 2003 (IEEE Cat. No.03CH37498) - Toronto, Canada (Oct. 22-24, 2003)] Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498) - Characteristics of cantilever beam fabricated by porous silicon micromachining for flow sensor application
Young-Min Kim,, Chang-Taeg Seo,, Duk-Soo Eun,, Sung-Gen Park,, Chan-Seop Jo,, Jong-Hyun Lee,Volume:
1
Année:
2003
Langue:
english
DOI:
10.1109/icsens.2003.1279016
Fichier:
PDF, 402 KB
english, 2003