[IEEE 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Cannes, France (2014.4.1-2014.4.4)] 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - High acoustic performance MEMS microspeaker
Sassine, Gilbert, Shahosseini, Iman, Woytasik, Marion, Martincic, Emile, Moulin, Johan, Lefeuvre, Elie, Houdouin, Alexandre, Durand, Stephane, Yaakoubi, NourdinAnnée:
2014
Langue:
english
DOI:
10.1109/dtip.2014.7056661
Fichier:
PDF, 416 KB
english, 2014