[IEEE International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 - Stockholm, Sweden (June 25-29, 1995)] Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 - Silicon Fusion Bonding and Deep Reactive Ion Etching a New Technology for Microstructures
Klaassen, E.H., Petersen, K., Noworolski, J.M., Logan, J., Maluf, N.I., Brown, J., Storment, C., McCullcy, W., Kovacs, G.T.A.Volume:
1
Année:
1995
Langue:
english
DOI:
10.1109/sensor.1995.717285
Fichier:
PDF, 764 KB
english, 1995
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