
Low Power Closed-loop Driving Circuit for Piezoelectric Microscanners Based on Tuneable Capacitive Position Sensors
Rombach, S., Marx, M., Gu-Stoppel, S., Manoli, Y.Volume:
120
Année:
2015
Langue:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2015.08.566
Fichier:
PDF, 1.18 MB
english, 2015