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SPIE Proceedings [SPIE 23rd Annual International Symposium on Microlithography - Santa Clara, CA, United States (Sunday 22 February 1998)] Advances in Resist Technology and Processing XV - New approaches to production-worthy 193-nm photoresists based on acrylic copolymers
Wallow, Thomas I., Allen, Robert D., Opitz, Juliann, Di Pietro, Richard A., Brock, Phillip J., Sooriyakumaran, Ratnam, Hofer, Donald C.Volume:
3333
Année:
1998
Langue:
english
DOI:
10.1117/12.312470
Fichier:
PDF, 1.29 MB
english, 1998