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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 24 February 2013)] Optical Microlithography XXVI - Mask compensation for process flare in 193nm very low k1 lithography
Lee, Jeonkyu, Conley, Will, Lee, Taehyeong, Oh, Sangjin, Kang, Chunsoo, Kim, Jungchan, Choi, Jaeseung, Park, Chanha, Yang, Hyunjo, Yim, Donggyu, Do, Munhoe, Su, Irene, Song, Hua, Choi, Jung-Hoe, Fan,Volume:
8683
Année:
2013
Langue:
english
DOI:
10.1117/12.2012463
Fichier:
PDF, 4.40 MB
english, 2013