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[IEEE 2015 China Semiconductor Technology International Conference (CSTIC) - Shanghai, China (2015.3.15-2015.3.16)] 2015 China Semiconductor Technology International Conference - STI gap-fill optimization for advanced nodes
Jun Yang,, Yan Yan,, Hao Deng,, Beichao Zhang,Année:
2015
Langue:
english
DOI:
10.1109/cstic.2015.7153395
Fichier:
PDF, 369 KB
english, 2015