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SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 1 February 2014)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX - Study of fast laser induced cutting of silicon materials
Nakata, Yoshiki, Xu, Xianfan, Roth, Stephan, Neuenschwander, Beat, Weinhold, S., Gruner, A., Ebert, R., Schille, J., Exner, H.Volume:
8967
Année:
2014
Langue:
english
DOI:
10.1117/12.2039819
Fichier:
PDF, 1.84 MB
english, 2014