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[IEEE 2004 International Semiconductor Conference. CAS 2004 (IEEE Cat. No.04TH8748) - Sinaia, Romania (Oct. 4-6, 2004)] 2004 International Semiconductor Conference. CAS 2004 Proceedings (IEEE Cat. No.04TH8748) - MEMS switches: design and manufacturing
Vasilache, D., Tibeica, C., Moagar, V., Enachescu, R., Iordache, M., Vladoianu, F., Podaru, C., Manea, E., Muller, A.Volume:
1
Année:
2004
Langue:
english
DOI:
10.1109/smicnd.2004.1402831
Fichier:
PDF, 203 KB
english, 2004