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SPIE Proceedings [SPIE 23rd Annual International Symposium on Microlithography - Santa Clara, CA, United States (Sunday 22 February 1998)] Advances in Resist Technology and Processing XV - Material design and lithographic performance of novel hydroxystyrene-copolymer-based DUV negative resists
Kudo, Takanori, Aramaki, Kayo, Masuda, Seiya, Pawlowski, GeorgVolume:
3333
Année:
1998
Langue:
english
DOI:
10.1117/12.312453
Fichier:
PDF, 2.57 MB
english, 1998