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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 27 February 2011)] Advances in Resist Materials and Processing Technology XXVIII - Primary structure control of ArF resist polymer by regulating feed rate of monomers and initiator
Oshikiri, Tomoya, Allen, Robert D., Somervell, Mark H., Yasuda, Atsushi, Kato, Keisuke, Maeda, Shin-ichiVolume:
7972
Année:
2011
Langue:
english
DOI:
10.1117/12.879421
Fichier:
PDF, 744 KB
english, 2011