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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Advances in Patterning Materials and Processes XXXII - Process variation challenges and resolution in the negative-tone develop double patterning for 20nm and below technology node
Wallow, Thomas I., Hohle, Christoph K., Mehta, Sohan S., Ganta, Lakshmi K., Chauhan, Vikrant, Wu, Yixu, Singh, Sunil, Ann, Chia, Subramany, Lokesh, Higgins, Craig, Erenturk, Burcin, Srivastava, Ravi,Volume:
9425
Année:
2015
Langue:
english
DOI:
10.1117/12.2087546
Fichier:
PDF, 4.50 MB
english, 2015