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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Advanced Etch Technology for Nanopatterning IV - Characterization of the effect of etch process operating environment on the perfluoroelastomer chamber seal systems
Lin, Qinghuang, Engelmann, Sebastian U., Zhang, Ying, Liu, Chinchao, Reichl, GaryVolume:
9428
Année:
2015
Langue:
english
DOI:
10.1117/12.2087324
Fichier:
PDF, 476 KB
english, 2015