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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 23 February 2014)] Extreme Ultraviolet (EUV) Lithography V - Repetitive operation of counter-facing plasma focus device: toward a practical light source for EUV lithography
Wood, Obert R., Panning, Eric M., Sodekoda, Tatsuya, Kuwabara, Hajime, Masuda, Masashi, Liu, Shijia, Kanou, Kouki, Kawaguchi, Kenta, Horioka, KazuhikoVolume:
9048
Année:
2014
Langue:
english
DOI:
10.1117/12.2046149
Fichier:
PDF, 563 KB
english, 2014