Low-damage NH3 plasma treatment on SiO2 tunneling oxide of chemically-synthesized gold nanoparticle nonvolatile memory
Wang, Jer-Chyi, Chang, Kai-Ping, Liao, Chin-Hsiang, Chang, Ruey-Dar, Lai, Chao-Sung, Chang, Li-ChunLangue:
english
Journal:
Current Applied Physics
DOI:
10.1016/j.cap.2016.03.009
Date:
March, 2016
Fichier:
PDF, 2.80 MB
english, 2016