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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 24 February 2013)] Optical Microlithography XXVI - Benchmarking study of 3D mask modeling for 2X and 1X nodes
Wang, ChangAn, Conley, Will, Liang, Chao-Chun, Liu, Huikan, Kallingal, Chidam, Dunn, Derren N., Oberschmidt, James, Tirapu Azpiroz, JaioneVolume:
8683
Année:
2013
Langue:
english
DOI:
10.1117/12.2011485
Fichier:
PDF, 1.69 MB
english, 2013