Stabilized Stroboscopic Full-Field Interferometer for Characterization of Subnanometer Surface Vibrations
Lipiainen, Lauri, Kokkonen, Kimmo, Kaivola, MattiVolume:
24
Langue:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2015.2428433
Date:
October, 2015
Fichier:
PDF, 1.29 MB
english, 2015