Vacuum Ars plasma source with controlled cathode spot motion
Aksyonov D. S.,Aksenov I. I.,Zadneprovsky Yu A.Volume:
6
Année:
2008
Langue:
english
Journal:
Восточно-Европейский журнал передовых технологий
DOI:
10.0000/cyberleninka.ru/article/n/vacuum-ars-plasma-source-with-controlled-cathode-spot-motion
Fichier:
PDF, 619 KB
english, 2008