SPIE Proceedings [SPIE International Conference on Correlation Optics - Chernivtsy, Ukraine (Tuesday 11 May 1999)] Fourth International Conference on Correlation Optics - Structural changes in silicon implanted by phosphorus
Fodchuk, Igor M., Raransky, M. D., Gimchinsky, O. G., Godovaniouk, V. M., Gultaj, L. L., Swiatek, Z., Bonarsky, J. N., Angelsky, Oleg V.Volume:
3904
Année:
1999
Langue:
english
DOI:
10.1117/12.370438
Fichier:
PDF, 831 KB
english, 1999