SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 23 February 2014)] Alternative Lithographic Technologies VI - Contact holes patterning by directed self-assembly of block copolymers: What would be the Bossung plot?
Resnick, Douglas J., Bencher, Christopher, Gharbi, A., Tiron, R., Argoud, M., Chevalier, X., Belledent, J., Pradelles, J., Pimenta Barros, P., Navarro, C., Nicolet, C., Hadziioannou, G., Fleury, G., BVolume:
9049
Année:
2014
Langue:
english
DOI:
10.1117/12.2046342
Fichier:
PDF, 2.09 MB
english, 2014
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