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Si/SiO2 multilayers: synthesis by reactive magnetron sputtering and photoluminescence emission
C. Ternon, F. Gourbilleau, R. Rizk, C. DufourVolume:
16
Année:
2003
Langue:
english
Pages:
6
DOI:
10.1016/s1386-9477(02)00632-x
Fichier:
PDF, 492 KB
english, 2003