Characterisation of ultraviolet annealed tantalum oxide films deposited by photo-CVD using 172 nm excimer lamp
Jun-Ying Zhang, Vincent Dusastre, Ian W. BoydVolume:
4
Année:
2001
Langue:
english
Pages:
5
DOI:
10.1016/s1369-8001(00)00107-4
Fichier:
PDF, 149 KB
english, 2001