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[ASME ASME 2005 International Mechanical Engineering Congress and Exposition - Orlando, Florida, USA (November 5 – 11, 2005)] Microelectromechanical Systems - Design, Fabrication, and Characterization of Piezoresistive MEMS Shear Stress Sensors
Barlian, A. Alvin, Park, Sung-Jin, Mukundan, Vikram, Pruitt, Beth L.Volume:
2005
Année:
2005
Langue:
english
DOI:
10.1115/imece2005-81849
Fichier:
PDF, 689 KB
english, 2005