[IEEE 2014 International Symposium on Fundamentals of Electrical Engineering (ISFEE) - Bucharest, Romania (2014.11.28-2014.11.29)] 2014 International Symposium on Fundamentals of Electrical Engineering (ISFEE) - Extraction of effective elastic coefficients from a coupled structural electrostatic simulation of a MEMS switch
Lup, Aurel-Sorin, Ciuprina, Gabriela, Stefanescu, AlexandraAnnée:
2014
Langue:
english
DOI:
10.1109/ISFEE.2014.7050539
Fichier:
PDF, 964 KB
english, 2014