
Carbon as a MEMS material: micro and nanofabrication of pyrolysed photoresist carbon
Wang, Chunlei, Zaouk, Rabih, Park, Benjamin Y., Madou, Marc J.Volume:
13
Année:
2008
Langue:
english
Journal:
International Journal of Manufacturing Technology and Management
DOI:
10.1504/IJMTM.2008.016782
Fichier:
PDF, 1.39 MB
english, 2008