SPIE Proceedings [SPIE Design, Test, and Microfabrication of MEMS/MOEMS - Paris, France (Tuesday 30 March 1999)] Design, Test, and Microfabrication of MEMS and MOEMS - Stress-induced curvature engineering in surface-micromachined devices
Aksyuk, Vladimir A., Pardo, Flavio, Bishop, David J., Courtois, Bernard, Crary, Selden B., Ehrfeld, Wolfgang, Fujita, Hiroyuki, Karam, Jean Michel, Markus, Karen W.Volume:
3680
Année:
1999
Langue:
english
DOI:
10.1117/12.341167
Fichier:
PDF, 1.63 MB
english, 1999