Modeling and analysis of MEMS capacitive differential pressure sensor structure for altimeter application
Parthasarathy, Eswaran, S, MalarvizhiVolume:
23
Langue:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2756-4
Date:
May, 2017
Fichier:
PDF, 1.40 MB
english, 2017