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Subsurface microscopy of biased metal-oxide-semiconductor field-effect-transistor structures: photothermal and electroreflectance images
J.A. Batista, A.M. Mansanares, E.C. da Silva, M.B.C. Pimentel, N. Jannuzzi, D. FournierVolume:
71
Année:
1998
Langue:
english
Pages:
6
DOI:
10.1016/s0924-4247(98)00169-1
Fichier:
PDF, 746 KB
english, 1998