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Reliability considerations for electrostatic polysilicon actuators using as an example the REMO component
C. Marxer, M.-A. Gre´tillat, N.F. de Rooij, R. Ba¨ttig, O. Anthamatten, B. Valk, P. VogelVolume:
61
Année:
1997
Langue:
english
Pages:
6
DOI:
10.1016/s0924-4247(97)80304-4
Fichier:
PDF, 1.21 MB
english, 1997