
Modeling the thermal behavior of a surface-micromachined linear-displacement thermomechanical microactuator
C.D. Lott, T.W. McLain, J.N. Harb, L.L. HowellVolume:
101
Année:
2002
Langue:
english
Pages:
12
DOI:
10.1016/s0924-4247(02)00202-9
Fichier:
PDF, 279 KB
english, 2002