A tetrahedral three-facet micro mirror with the inclined deep X-ray process
Dong-Young Oh, Kyehwan Gil, Suk Sang Chang, Dong Kwan Jung, Noh Y Park, Seung S LeeVolume:
93
Année:
2001
Langue:
english
Pages:
5
DOI:
10.1016/s0924-4247(01)00645-8
Fichier:
PDF, 234 KB
english, 2001